CAMECA SX100 Electron Probe Microanalyzer
Location: 2501B North University Building
Contact: Owen Neill
- CAMECA SX100 #884, Installed 2009
- Purchased by the Air Force Research Laboratory in 2009.
- Donated to the University of Michigan in the spring of 2023.
- Electron Optics and Imaging
- Self-biasing LaB6 cathode.
- Two-stage electromagnetic condenser lenses.
- Beam regulation from 1-300nA.
- Secondary and backscatter electron detectors for electron imaging.
- Wavelength-Dispersive X-ray Spectrometry
- Five wavelength-dispersive X-ray spectrometers with 160mm Rowland circles.
- Diffracting crystals capable of analyzing C-U.
- Spectrometer 1: LiF, PET, TAP, PC2
- Spectrometer 2: PET, TAP, PC0, PC1
- Spectrometer 3: LLiF, LPET
- Spectrometer 4: LPET, LTAP
- Spectrometer 5: LLiF, LPET
- Large-area diffracting crystals (spectrometers 3, 4 and 5) for increased sensitivity.
- Software and Data Processing
- CAMECA PeakSight software for automated data acquistion and processing.
- PictureSnapApp software for sample navigation.