SEM Instrumentation

  • JEOL JSM-7800FLV Scanning Electron Microscope
  • Installed 2015
    • Funding from EMAL, the University of Michigan College of Literature, Science and the Arts, the Department of Earth and Environmental Sciences, and the Office of Research.
  • Electron Optics
    • Schottky-type field-emission electron source.
    • Accelerating voltages of 0.01-30 kV (0.01 kV steps).
    • JEOL Super-Hybrid Lens (SHL) for improved resolution at low accelerating voltages.
  • Electron Imaging
    • In-chamber Everhart-Thornley secondary electron detector.
    • In-lens backscatter electron detector.
    • Retractable in-chamber backscatter electron detector.
    • Retractable variable pressure backscatter electron detector for low-vacuum imaging
    • JEOL automated image acquisition and processing.
  • Cathodoluminescence Imaging
    • Cathodoluminescence imaging is not currently available, but will be added in the near future.
  • Energy-Dispersive X-ray Spectrometry
    • Oxford XMaxN 80mm² silicon-drift energy-dispersive X-ray spectrometer.
    • Oxford Aztec v3.3 EDS acquisition and processing software.
  • Electron Backscatter Diffraction
    • Oxford NordlysMax² electron backscatter diffraction system.
    • Oxford AztecHKL acquisition and processing software.
  • Other Features
    • ibss Group GV10x downstream asher plasma cleaner.
    • Liquid nitrogen cold-finger.
    • Integrated Dynamics Engineering magnetic field canceling system.